High-purity seal supply for semiconductor process environments.

PRP has supplied elastomeric seals to semiconductor process equipment manufacturers and tool builders for over 40 years. Our compound portfolio includes Parker EMG FKM and VMQ compounds, Kalrez® FFKM across the full range including semiconductor etch-specific grades, and custom configurations for aggressive chemical environments.

seals for semiconductor

Kalrez® for Semiconductor

Kalrez 9100 stocked for common semiconductor etch applications. Full balance of Kalrez® semiconductor compound range available order-on-demand. Application-specific grade selection support available.

VeriClean Seals™ for Semiconductor

VeriClean Seals™ are available for semiconductor applications. Particle-measured from ≥1.3 µm. ISO Class 7 cleanroom processed. Backwards compatible with existing process tool BOM specifications.